>Microchips were an incremental improvement where the individual increments yielded utility far greater than the investment.
You should look up how modern EUV lithography was commercialised. This was essentially a big plasma physics puzzle. If ASML hadn't taken on a ridiculous gamble (financially on the same order of magnitude as a new collider, esp. for a single colpany) with the research, Moore's law would have died long ago and the entire tech industry would be affected. And there was zero proof that this was going to work beforehand.
High vacuum in enormous volumes maybe. Otherwise it was certainly a problem solved decades ago.
Not sure what role of EUV optics was in LHC. But Zeiss would develop you anything on the frontier of optics if you have deep enough pockets.
The rest I don't know enough to comment on, but as far as technology goes both LHC and EUV lithography are bespoke systems. Seriously doubt there is any path dependency. Huge part of LHC cost were earthworks and precision construction of complex machinery at enormous scale.
You should look up how modern EUV lithography was commercialised. This was essentially a big plasma physics puzzle. If ASML hadn't taken on a ridiculous gamble (financially on the same order of magnitude as a new collider, esp. for a single colpany) with the research, Moore's law would have died long ago and the entire tech industry would be affected. And there was zero proof that this was going to work beforehand.